2024-02-MKP-카탈로그28p-영문_수정2(저)

▪Applied Teflon Disc - Guarantee the durability against toxic and corrosive gas - Improve the response speed over entire section through plastic deformation ▪Applied the surge protection circuit in order to reinforce safety standard ▪Applied the temperature compensation circuit to maintain the accuracy against environmental temperature change Product Description VIC-D200 Series Digital Mass Flow Controller Product Specification Description VIC-D210 VIC-D220 VIC-D240 VIC-D245 Flow Range (N 2 Equivalent) 5 sccm ~ 1.5 slm 1.5 ~ 50 slm 50 ~ 200 slm 200 ~ 400 slm Flow Control Range 2 ~ 100% of Full Scale Accuracy ≤ ± 1% of Full Scale ≤ ± 2% of Full Scale Response Time ≤ 1 sec (10 ~ 100%) ≤ 1.2 sec (20 ~ 100%) ≤ 1.5 sec (10 ~ 20%) Linearity ≤ ± 0.2% of Full Scale Repeatability ≤ ± 0.2% of Full Scale Value Type Normally Closed Solenoid Seal Type Elastomer (Viton ® , Viton-ETP ® , Kalrez ® , etc.) Input / Output Signal Analog Mode: 0 ~ 5VDC or 4 ~ 20mA Digital Mode: RS-485 (D-NET Possible) Power Supply +24VDC (+15VDC products are also available.) +24VDC Recommended Operating Temperature Range 15 ~ 35℃ Warm-up Time 30 min Electrical Connection D-SUB 9P MALE (Exclusively for D-NET: M12 5P MALE) Weight (STS) 0.95 kg 0.97 kg 1.87 kg 3.3 kg Weight (AL) 0.67 kg 0.69 kg 1.35 kg 2.09 kg ※ ‘sccm’ and ‘slm’ is the flow unit at the standard condition (0℃, 101.3 kPa). ※ This specification is subject to change without prior notice.