2024-02-MKP-카탈로그28p-영문_수정2(저)

D-SUB 9PIN 12.7 100 4-M4*PO.7 DP:4 14 20 48 76 30.6 A VIC-S220 Digital Mass Flow Controller Description VIC-S220 Flow Range (N 2 Equivalent) 5 sccm ~ 50 slm Flow Control Range 2 ~ 100% of Full Scale Accuracy ≤ ± 1% of Full Scale Response Time ≤ 1 sec Linearity ≤ ± 0.2% of Full Scale Repeatability ≤ ± 0.2% of Full Scale Value Type Normally Closed Solenoid Seal Type Standard : Viton ® / Option : PTFE Input / Output Signal Analog Mode: 0 ~ 5VDC or 4 ~ 20mA Digital Mode: RS-485 Power Supply +24 VDC Recommended Operating Temperature Range 15 ~ 35℃ Warm-up Time 30 min Electrical Connection D-SUB 9P MALE Weight (AL) 640 g Product Specification ※ ‘sccm’ and ‘slm’ is the flow unit at the standard condition (0℃, 101.3 kPa). ※ This specification is subject to change without prior notice. ▪Developed VIC-D200 Series-based micro product ▪Verify the real-time flow through display ▪Applied Teflon disc - Guarantee the durability against toxic and corrosive gas - Improve response speed over entire section through plastic deformation Product Description Model A 1/8" LOK 1/4" LOK 3/8" LOK 1/2" LOK 1/4" VCR 1/2" VCR 6mm 8mm 10mm 12mm VIC-S220 123 128.3 130.2 134.2 123 131.6 128.3 130.4 130.4 135.6 VIC-S220 Exterior Drawing