2024-02-MKP-카탈로그28p-영문_수정2(저)
CAF-100 Series Digital Mass Flow Controller Product Specification Description CAF-145 CAF-150 CAF-155 Flow Range (N 2 Equivalent) 100 ~ 500 slm 500 ~ 2,000 slm 2,000 ~ 3,000 slm Flow Control Range 2 ~ 100% of Full Scale Accuracy ≤ ± 2% of Full Scale ≤ ± 2.5% of Full Scale Response Time ≤ 1.5 sec ≤ 2 sec Linearity ≤ ± 0.2% of Full Scale Repeatability ≤ ± 0.2% of Full Scale Valve Leak 1) ≤ ± 1% of Full Scale Value Type Normally Closed Solenoid Seal Type Elastomer (Viton ® , Viton-ETP ® , Kalrez ® , etc.) Input / Output Signal Analog Mode: 0 ~ 5VDC or 4 ~ 20mA Digital Mode: RS-485 (D-NET, EtherCAT Possible) Power Supply +24VDC Recommended Operating Temperature Range 15 ~ 35℃ Warm-up Time 30 min Electrical Connection D-SUB 9P MALE (D-NET: M12 5P MALE, EtherCAT: M8 5P MALE) Weight (STS) 7 kg 10 kg 14 kg Weight (AL) 5.63 kg 7.64 kg 10.55 kg 1) MFC’s control valve is capable of precise control, but it is not designed for shut-off. If shut-off is required, please use it after installing the separate shut-off valve. ※ ‘sccm’ and ‘slm’ is the flow unit at the standard condition (0℃, 101.3 kPa). ※ This specification is subject to change without prior notice. ※ All products of MK Precision which are manufactured with patented technology are protected by patent law. ▪Designed the double-disc valve - Enable to control large flow with low pressure (Refer to bottom of page 17) - Compact product size ▪Has fast response speed with the direct type structure ▪Has excellent durability compared to pilot and diaphragm method Product Description
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