2024-02-MKP-카탈로그28p-영문_수정2(저)

TSM-D200 Series Digital Mass Flow Meter Product Specification Description TSM-D210 TSM-D220 TSM-D230 TSM-D240 TSM-D245 TSM-D250 TSM-D260 Flow Range (N 2 Equivalent) 5 sccm ~ 1.5 slm 1.5 ~ 30 slm 30 ~ 100 slm 100 ~ 400 slm 400 ~ 1,000 slm 1,000 ~ 2,000 slm 2,000 ~ 5,000 slm Flow Measurement Range 2 ~ 100% of Full Scale Accuracy ≤ ± 1% of Full Scale ≤ ± 2% of Full Scale Linearity ≤ ± 0.2% of Full Scale Repeatability ≤ ± 0.2% of Full Scale Seal Type Elastomer (Viton ® , Viton-ETP ® , Kalrez ® , etc.) Input / Output Signal Analog Mode: 0 ~ 5VDC or 4 ~ 20mA Digital Mode: RS-485 Power Supply +15VDC or +24VDC Recommended Operating Temperature Range 15 ~ 35℃ Warm-up Time 30 min Electrical Connection D-SUB 9P MALE Weight (STS) 0.73 kg 0.75 kg 1 kg 1.71 kg 4.5 kg 5.6 kg 12.2 kg Weight (AL) 0.44 kg 0.46 kg 0.55 kg 0.9 kg 2.07 kg 2.84 kg 8.76 kg ※ ‘sccm’ and ‘slm’ is the flow unit at the standard condition (0℃, 101.3 kPa). ※ This specification is subject to change without prior notice. ▪Able to measure the accurate flow under low operating differential pressure ▪When the display option is added, enable to monitor the flow and operation condition in real-time Product Description