2024-02-MKP-카탈로그28p-영문_수정2(저)

TSM-L100 Series Analog Mass Flow Meter Description TSM-L120 TSM-L130 TSM-L140 Flow Range (N 2 Equivalent) 5 sccm ~ 60 slm 60 ~ 150 slm 150 ~ 400 slm Flow Measurement Range 2 ~ 100% of Full Scale Accuracy ≤ ± 5% of Full Scale Linearity ≤ ± 0.5% of Full Scale Repeatability ≤ ± 0.5% of Full Scale Seal Type Elastomer (Viton ® , Viton-ETP ® , Kalrez ® , etc.) Input / Output Signal Analog Mode: 0 ~ 5VDC or 4 ~ 20mA Power Supply +15VDC or +24VDC Recommended Operating Temperature Range 15 ~ 35℃ Warm-up Time 30 min Electrical Connection D-SUB 15PIN MALE MOLEX 4P MALE Weight (STS) 0.46 kg 0.84 kg 1.2 kg ▪Efficient use of space with compact size ▪Entry-level model Product Description Product Specification Model A B C D E TSM-L120 86 27.1 12.5 77 1/8''PT, 1/4''PT TSM-L130 86 36.2 17 84.1 3/8''PT TSM-L140 86 51.2 24.5 99 UNF 3/4''-16N ※ ‘sccm’ and ‘slm’ is the flow unit at the standard condition (0℃, 101.3 kPa). ※ This specification is subject to change without prior notice. TSM-L100 Series Exterior Drawing A B E C D