2024-02-MKP-카탈로그28p-영문_수정2(저)

Theultra-precision flowmeasurementsystem through innovationandcraftsmanship Specification Selection Table 1 V 100 A - N2 - R 0 L 3 - T 03 N - 4 S 240 Flow Rate (F.S.) Gas Working Pressure Model No. 1 MFC 2 MFM 3 EPC MFC MFM EPC T TSC TSM L TSC-L TSM-L V VIC-D W VIC-W S VIC-S C CAF P PSC X EXO E EPC K TSC-M Unit A slpm B sccm C lpm D ccm E bar(g) Q Others Signal Type R RS-485 V 0 ~ 5V A 4 ~ 20mA D DeviceNet E EtherCAT Q Others Fitting Type L LOK V VCR F Flange T Tube Q Others Sealing Type 0 Viton 1 Viton-ETP 2 Kalrez 3 Neoprene 4 Welding+Metal+PTFE 5 Others Body Materials 0 Manufacturer standard 1 STS 316 2 STS 304 3 A 6061 4 MC Nylon 5 Others Fitting Size 1 1/8” 2 1/4” 3 3/8” 4 1/2” 5 3/4” 6 1” 7 6mm 8 8mm 9 10mm 10 Others Sensor Type T Thermal P Pressure Display Type D Display N Normal Disk Type S Single D Double N None 2nd campus