2024-02-MKP-카탈로그28p-영문_수정2(저)

07 EXO-100 Series Product Specification Description EXO-110 EXO-120 EXO-140 EXO-145 Flow Range (N 2 Equivalent) 5 sccm ~ 1.5 slm 1.5 ~ 50 slm 50 ~ 200 slm 200 ~ 400 slm Flow Control Range 2 ~ 100% of Full Scale Accuracy ≤ ± 1% of Full Scale Response Time ≤ 1 sec ≤ 1.5 sec Linearity ≤ ± 0.2% of Full Scale Value Type Normally Closed Solenoid Seal Type Elastomer (Viton ® , Viton-ETP ® , Kalrez ® , etc.) Input / Output Signal Analog Mode: 0~5VDC or 4~20mA Digital Mode: RS-485 Power Supply +15VDC ~ +24VDC Recommended Operating Temperature Range 15 ~ 35℃ Warm-up Time 30 min Electrical Connection Terminal Block Wiring Method Operating Environment / Protection Degree ZONE 2 / IP65 Weight (STS) 2.9 kg 2.9 kg 3.7 kg 4.7 kg Weight (AL) 2.08 kg 2.08 kg 2.64 kg 3.4 kg ※ ‘sccm’ and ‘slm’ is the flow unit at the standard condition (0℃, 101.3 kPa). ※ This specification is subject to change without prior notice. Model A B C D E F G H LOK VCR mm 1/8" 1/4" 3/8" 1/2" 3/4" 1/4" 1/2" 6 8 10 12 EXO-110,120 176 12.7 45 134 181 186.3 188.2 192.2 - 181 189.6 184.8 187.2 188.4 193.6 6 122 37.5 EXO-140 188 20.5 45 148.5 - 200.8 204.3 208.7 217.9 198.5 207.5 201.5 203.7 205.1 - 22.4 120.1 37.5 EXO-145 196 24.5 49.5 148 - - 207 212.2 211.4 - 206 - - - - 22.4 120.1 37.5 EXO-100 Series F D A B E C G H 2-M6 TAP DP:6 EXO-100 Series Exterior Drawing