MFC
VIC-D145 VIC-D100 Series
- Fast response time in all sections by applying Teflon disk
- Significant increase in durability against toxic and corrosive gases
- Surge and withstand voltage protection circuit applied
- With temperature compensation, it maintains the accuracy when ambient temperature changes
Contents
| Product specification | |
|---|---|
| Flow range (N2) | 400~1000slm |
| Flow control range | of full scale2 ~ 100% |
| Accuracy | ≤ ± 2% of Full Scale |
| Response time | ≤ 2 sec (2 ~ 10%) ≤ 1.5 sec (10 ~ 100%) |
| Linearity | ≤ ± 0.2% of full scale |
| Operating principle | thermal |
| Control valve type | Normally Closed Solenoid |
| Type of seal | Elastomer (Viton®, Viton-ETP®, Kalrez®, etc.) |
| In/Outlet signal | Analog: 0 ~ 5Vdc or 4 ~ 20mA Digital: RS-485(Optional : DeviceNet, EtherCat) |
| Power supply | +15VDC ~ +24VDC |
| Operating temperature | 5 ~ 50℃ (recommended temperature range: 15 ~ 35℃) |
| Display | Standard : D-SUB 9 pin Male Optional : DeviceNet Micro style Connector, RJ45 |
| Explosion-proof | N/A |
| Signal | N/A |
| Weight | 6.5kg |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
| VIC-D100 Series Appearance drawing |
|---|
 |
| Model | A | B | C | D | E | ||||
|---|---|---|---|---|---|---|---|---|---|
| 3/8" LOK | 1/2" LOK | 3/4" LOK | 1" LOK | 1/2" VCR | |||||
| VIC-D145 | 170 | 228.92 | 234.5 | 234.08 | - | 229 | Ø79 | 36.4 | 180.6 |
| VIC-D150 | 170 | - | 238.08 | 238.08 | 246.72 | - | Ø90 | 42.4 | 192.6 |