MFC
VIC-W210 VIC-W200 Series
- Enhanced durability against toxic gases
- Metal gasket and Teflon capsule O-ring resistant to wet gas applied
- Complete external leakage protection by welding inlet-outlet fittings
- Response speed within 1 second in all sections
- No disk deformation (Semi-permanent performance guaranteed)
- Surge and withstand voltage protection circuit
- Built-in temperature compensation circuit and the realization of accuracy within 1%
Contents
| Product specification | |
|---|---|
| Flow range (N2) | 5sccm~1.5slm |
| Flow control range | of full scale2 ~ 100% |
| Accuracy | ≤ ± 1% of Full Scale |
| Response time | ≤ 1.0 sec (10 ~ 100%) |
| Linearity | ≤ ± 0.2% of full scale |
| Operating principle | thermal |
| Control valve type | Nomally Closed Solenoid |
| Type of seal | Metal + FEP ENCAPSULATED O RING |
| In/Outlet signal | Analog: 0 ~ 5Vdc or 4 ~ 20mA Digital: RS-485(Optional : DeviceNet, EtherCat) |
| Power supply | '+15VDC ~ +24VDC |
| Operating temperature | 5 ~ 50℃ (recommended temperature range: 15 ~ 35℃) |
| Display | Standard : D-SUB 9 pin Male Optional : DeviceNet Micro style Connector, RJ45 |
| Explosion-proof | N/A |
| Signal | N/A |
| Weight | 1kg |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
| VIC-W200 Series Appearance drawing |
|---|
 |
| Model | A | |||||
|---|---|---|---|---|---|---|
| 1/8" LOK | 1/4" LOK | 3/8" LOK | 1/2" LOK | 1/4" VCR | 1/2" VCR | |
| VIC-W210 | 128.8 | 133.3 | 136.4 | 140.4 | 129.8 | 137.8 |
| VIC-W220 | ||||||