MFM
TSM-D210 TSM-D200 Series
- When the display type is applied, it monitors flow and operation status in real time.
- Fast response speed and high accuracy
- Maximized stability against external influences
Contents
| Product specification | |
|---|---|
| Flow range (N2) | 5ccm~1.5slm |
| Flow control range | of full scale2 ~ 100% |
| Accuracy | ≤ ± 1% of Full Scale |
| Response time | ≤ 1 sec |
| Linearity | ≤ ± 0.2% of full scale |
| Operating principle | thermal |
| Control valve type | - |
| Type of seal | Elastomer (Viton®, Viton-ETP®, Kalrez®, etc.) |
| In/Outlet signal | Analog: 0 ~ 5VDC or 4 ~ 20mA / Digital: RS-485 (D-NET can be applied.) |
| Power supply | +15VDC or +24VDC |
| Operating temperature | 5 ~ 50℃ (recommended temperature range: 15 ~ 35℃) |
| Display | D-SUB 9P MALE (D-NET Connector can be applied.) |
| Explosion-proof | N/A |
| Signal | apply(Option) |
| Weight | 0.7kg |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
| TSM-D200 Series Appearance drawing |
|---|
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| Model | A | B | C | D | E | F | G | H | I | |||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 1/8" LOK | 1/4" LOK | 3/8" LOK | 1/2" LOK | 3/4" LOK | 1" LOK | 1/4" VCR | 1/2" VCR | |||||||||
| TSM-D210,220 | 76 | 122.74 | 127.32 | 130.36 | - | - | - | 123.8 | 130.1 | 30.8 | 12.7 | 110.2 | 14 | 48 | 20 | 2-M4 DP-6 |
| TSM-D230 | 76 | - | 128.84 | 131.88 | 137.48 | 145.6 | - | - | 131.4 | 35 | 21 | 123.2 | 24 | 48 | 20 | 2-M4 DP-6 |
| TSM-D240 | 76 | - | 128.84 | 131.88 | 137.48 | 145.6 | - | - | 131.4 | Ø61 | 27.8 | 135.5 | 14 | 48 | 20 | 2-M4 DP-5.5 |
| TSM-D245 | 130.1 | - | - | 189.02 | 194.6 | 198.18 | - | - | 189.1 | Ø79 | 36.4 | 154.0 | 26.5 | 48 | - | 2-M4 DP-6 |
| TSM-D250 | 130.1 | - | - | - | 198.18 | 198.18 | 206.82 | - | - | Ø90 | 42.4 | 166.0 | 26.5 | 48 | - | 2-M4 DP-6 |