| Product specification |
| Flow range (N2) |
500~1500slm |
| Flow control range |
of full scale2 ~ 100% |
| Accuracy |
≤ ± 2.5% of Full Scale |
| Response time |
≤ 1.8 sec |
| Linearity |
≤ ± 0.2% of full scale |
| Operating principle |
thermal |
| Control valve type |
Normally Closed (Double disk) |
| Type of seal |
Elastomer (Viton®, Viton-ETP®, Kalrez®, etc.) |
| In/Outlet signal |
Analog: 0 ~ 5VDC or 4 ~ 20mA / Digital: RS-485 |
| Power supply |
+15VDC ~ +24VDC |
| Operating temperature |
|
| Display |
와이어링 |
| Explosion-proof |
ZONE 2 |
| Signal |
N/A |
| Weight |
x |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
