MFC
EXO-110 EXO-100 Series
- Fast response time for large flow
- Explosion proof certification
- Excellent waterproof and dust-resistant (IP65)
- Surge protection and temperature compensation circuit applied
Contents
| Product specification | |
|---|---|
| Flow range (N2) | 5sccm~1500sccm |
| Flow control range | of full scale2 ~ 100% |
| Accuracy | ≤ ± 1% of Full Scale |
| Response time | ≤ 1 sec |
| Linearity | ≤ ± 0.2% of full scale |
| Operating principle | thermal |
| Control valve type | Normally Closed (Single disk) |
| Type of seal | Elastomer (Viton®, Viton-ETP®, Kalrez®, etc.) |
| In/Outlet signal | Analog: 0 ~ 5VDC or 4 ~ 20mA / Digital: RS-485 |
| Power supply | +15VDC ~ +24VDC |
| Operating temperature | 5 ~ 50℃ (recommended temperature range: 15 ~ 35℃) |
| Display | 와이어링 |
| Explosion-proof | ZONE 2 |
| Signal | N/A |
| Weight | |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
| EXO-100 Series Appearance drawing |
|---|
 |
| Model | A | B(Fitting) | C | D | E | F | G | H | ||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 1/8" LOK | 1/4" LOK | 3/8" LOK | 1/2" LOK | 3/4" LOK | 1/4" VCR | 1/2" VCR | ||||||||
| EXO-110 EXO-120 |
134 | 180.74 | 185.4 | 188.4 | - | - | 181.8 | - | 45 | 12.7 | 174 | 6 | 122 | 37.5 |
| EXO-140 | 148.5 | - | 201.3 | 204.3 | 209.9 | 218.1 | - | 203.9 | 45 | 20.5 | 188 | 22.4 | 120.1 | 37.5 |
| EXO-145 | 148 | - | - | 207 | 212.6 | 216.1 | - | 207 | 49.5 | 24.5 | 194 | 22.4 | 120.1 | 37.5 |