MFC
EXO-D155 EXO-D100 Series
- Fast response time for large flow
- With double disk and compact size, it controls large flow
- It controls large flow at low pressure
- Explosion proof certification
- Excellent waterproof and dust-resistant (IP65)
- Surge protection and temperature compensation circuit applied
Contents
Product specification | |
---|---|
Flow range (N2) | 1500~3000slm |
Flow control range | of full scale2 ~ 100% |
Accuracy | ≤ ± 2.5% of Full Scale |
Response time | ≤ 1.8 sec |
Linearity | ≤ ± 0.2% of full scale |
Operating principle | thermal |
Control valve type | Normally Closed (Double disk) |
Type of seal | Elastomer (Viton®, Viton-ETP®, Kalrez®, etc.) |
In/Outlet signal | Analog: 0 ~ 5VDC or 4 ~ 20mA / Digital: RS-485 |
Power supply | +15VDC ~ +24VDC |
Operating temperature | |
Display | D-SUB 9P MALE (D-NET Connector can be applied.) |
Explosion-proof | ZONE 2 |
Signal | N/A |
Weight |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
Model | A | B | C | D | E | F | G | H | ||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
3/8" LOK | 1/2" LOK | 3/4" LOK | 1" LOK | 1/2" VCR | ||||||||
EXO-D145 | 225 | 25 | 57 | 189 | 248 | 253.6 | 257.08 | - | 248 | 40 | 109 | 30 |
EXO-D150 | 240 | 32.5 | 65 | 214 | - | 282 | 282 | 290.6 | - | 92.3 | 90 | 55 |
EXO-D155 | 251 | 38 | 76 | 235 | - | - | - | 311.6 | - | 104.8 | 90 | 55 |