MFC
VIC-D245 VIC-D200 Series
- Fast response time in all sections by applying Teflon disk
- Significant increase in durability against toxic and corrosive gases
- Surge and withstand voltage protection circuit applied
- With temperature compensation, it maintains the accuracy when ambient temperature changes
Contents
Product specification | |
---|---|
Flow range (N2) | 200~400slm |
Flow control range | of full scale2 ~ 100% |
Accuracy | ≤ ± 1% of Full Scale |
Response time | ≤ 1.2 sec (20 ~ 100%) ≤ ≤ 1.5 sec (10 ~ 20%) |
Linearity | ≤ ± 0.2% of full scale |
Operating principle | thermal |
Control valve type | Normally Closed Solenoid |
Type of seal | Elastomer (Viton®, Viton-ETP®, Kalrez®, etc.) |
In/Outlet signal | Analog: 0 ~ 5Vdc or 4 ~ 20mA Digital: RS-485(Optional : DeviceNet, EtherCat) |
Power supply | +15VDC ~ +24VDC |
Operating temperature | 5 ~ 50℃ (recommended temperature range: 15 ~ 35℃) |
Display | Standard : D-SUB 9 pin Male Optional : DeviceNet Micro style Connector, RJ45 |
Explosion-proof | N/A |
Signal | N/A |
Weight | 3.3kg |
sccm and slm are symbols that indicate standard gas flow (mL/min, L/min, at 0'C101.3kPa).
Model | A | B | C | D | E | F | G | H | ||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
1/8" LOK | 1/4" LOK | 3/8" LOK | 1/2" LOK | 3/4" LOK | 1/4" VCR | 1/2" VCR | ||||||||
VIC-D210,220 | 76 | 122.74 | 127.32 | 130.36 | - | - | 123.8 | - | 30.8 | 12.7 | 136.8 | 14 | 48 | 20 |
VIC-D240 | 95 | - | 147.84 | 150.88 | 156.48 | 163.08 | - | 150.4 | 40.8 | 19.5 | 153.6 | 23.5 | 48 | 20 |
VIC-D245 | 95 | - | - | 199.92 | 205.5 | 209.08 | - | 200 | 49 | 24.5 | 151.8 | 14.5 | 54 | 24 |